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Analysing hydrogen leaks using microelectromechanical systems

© Hahn-Schickard, Publisher FSKZ e. V.

The image shows a MEMS gas sensor photographed with a scanning electron microscope. The centrepiece of the sensor structure is a thin perforated membrane in which a heating element and temperature sensors are integrated
© Hahn-Schickard, Publisher FSKZ e. V.